Proceedings PaperFrequency Analysis And Filtering Of Surface Profile Data
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Frequency-domain analysis offers several advantages when considering surface profile measurements. Vibration of the sample during the measurement is often clearly defined in the profile frequency spectrum and its effect on the measured data can be reduced by an appropriate filter. The finish of surfaces with periodic height variations (such as diffraction gratings) can be measured if the periodic structure is first removed. This paper examines the application of frequency filtering techniques to these problems.