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Proceedings Paper

Scanning Tunneling Microscopy (STM) Of A Diamond-Turned Surface And A Grating Replica
Author(s): R. A. Dragoset; T. V. Vorburger
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Paper Abstract

The technique of scanning tunneling microscopy has been applied to topographic mapping of two optical surfaces -- a ruled grating replica and a diamond-turned gold mirror. By taking measurements with both a scanning tunneling microscope and a conventional stylus instrument, we have compared profiles and power spectral density (PSD) functions calculated from the profiles of a grating replica. Furthermore, surface structure was observed and PSD's were calculated for a diamond-turned surface measured with a STM. No structure was detected by the stylus instrument due to the spacing of the grooves on the diamond-turned sample. These measurements yield information necessary to gaining a better understanding of the diamond-turning process.

Paper Details

Date Published: 20 April 1987
PDF: 5 pages
Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); doi: 10.1117/12.939841
Show Author Affiliations
R. A. Dragoset, National Bureau of Standards (United States)
T. V. Vorburger, National Bureau of Standards (United States)

Published in SPIE Proceedings Vol. 0749:
Metrology: Figure and Finish
Bruce E. Truax, Editor(s)

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