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Proceedings Paper

Dimensional Profiling By Electronic Phase Measurement
Author(s): R. Thalmann; R. Dandliker
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Paper Abstract

The application of electronic phase measurement techniques (heterodyne and quasi-heterodyne fringe interpolation) to dimensional profiling of 3-D objects is discussed. The contour fringes are generated by interference of two illumination sources or by two-wavelength holography. The use of a micro-computer for automated data acquisition and processing allows to determine the object shape for a large number of points and for arbitrarily shaped contour fringe surfaces. Experimental results are reported with both, heterodyne and quasi-heterodyne phase measurement, offering a typical accuracy for object depth measurement of 0.2% of the lateral extension of the object.

Paper Details

Date Published: 10 September 1987
PDF: 8 pages
Proc. SPIE 0746, Industrial Laser Interferometry, (10 September 1987); doi: 10.1117/12.939765
Show Author Affiliations
R. Thalmann, University of Neuchatel (Switzerland)
R. Dandliker, University of Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 0746:
Industrial Laser Interferometry
Ryszard J. Pryputniewicz, Editor(s)

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