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Proceedings Paper

Semiconductor Processing Using Excimer Lasers
Author(s): Robert J. Pressley
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Paper Abstract

Lasers have been used to machine semiconductors for many years (Fig. 1). The first practical application was scribing silicon wafers with a Q-switched YAG laser. Many others followed, with the use often determined by the features of the available lasers. This process has been modified slightly in recent years, with lasers being tailored to fill a perceived need.

Paper Details

Date Published: 6 April 1987
PDF: 8 pages
Proc. SPIE 0737, New Developments and Applications in Gas Lasers, (6 April 1987); doi: 10.1117/12.939679
Show Author Affiliations
Robert J. Pressley, XMR Inc. (United States)

Published in SPIE Proceedings Vol. 0737:
New Developments and Applications in Gas Lasers
Lee R. Carlson, Editor(s)

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