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Proceedings Paper

Use Of The WYKO And Sommargren Profilers In Polishing Research
Author(s): Norman J Brown
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Paper Abstract

This paper compares the WYKO and Sommargren noncontact surface profilers, describes their utility and limitations, their accuracy and their use in polishing research. Surface readings below lA rms by these instruments are reported.

Paper Details

Date Published: 23 March 1987
PDF: 9 pages
Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); doi: 10.1117/12.939604
Show Author Affiliations
Norman J Brown, Lawrence Livermore National Laboratory (United States)

Published in SPIE Proceedings Vol. 0680:
Surface Characterization and Testing
Katherine Creath, Editor(s)

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