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Proceedings Paper

Comparison Of Profiler Measurements Using Different Magnification Objectives
Author(s): P Z Takacs; E L Church
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Paper Abstract

A WYKO TOPO-2D optical profiler system with four different magnification objectives (2.5X, 10X, 20X and 40X) was used to measure the microroughness properties of a set of five different flat samples. Measurements are compared in terms of the average periodogram for each surface as a function of microscope objective, and the effects of correcting for the transfer function of each objective are assessed.

Paper Details

Date Published: 23 March 1987
PDF: 9 pages
Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); doi: 10.1117/12.939603
Show Author Affiliations
P Z Takacs, Brookhaven National Laboratory (United States)
E L Church, Brookhaven National Laboratory (United States)


Published in SPIE Proceedings Vol. 0680:
Surface Characterization and Testing
Katherine Creath, Editor(s)

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