Share Email Print

Proceedings Paper

Structure Effects In Optical Surface Metrology
Author(s): E L Church; S R Lange
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Optical measurements of surface topography require the translation of measured phase shifts, Φ , into distances, Z , using a physical model for the air-surface interface. The usual expression used for this purpose = etp is based on the simple-interface model: air or vacuum above and a homogeneous half space of material below, with a sharp dividing line in between. This paper discusses the corrections to this expression which appear when one considers more complicated models. These appear as added pseudoheight contributions which arise from spatial variations of the parameters appearing in the more camplicated models, in addition to the geametrical height variations included in the simple-interface model. Formulas are given and results illustrated for several cases of practical interest.

Paper Details

Date Published: 23 March 1987
PDF: 8 pages
Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); doi: 10.1117/12.939602
Show Author Affiliations
E L Church, USA ARDEC (United States)
S R Lange, Wyko Corporation (United States)

Published in SPIE Proceedings Vol. 0680:
Surface Characterization and Testing
Katherine Creath, Editor(s)

© SPIE. Terms of Use
Back to Top