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Proceedings Paper

Longscan Surface Profile Measurements Using A Phase-Modulated Mirau Interferometer
Author(s): E R Cochran; J C Wyant
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Paper Abstract

A method for extending the measurement range of a two-dimensional optical profiler is described. Using a phase-modulated Mirau interferometer coupled to a microscope with a computer controlled stage a high density of data points is obtained over an extended region. Successive interferograms are combined by matching the piston and tilt of each scan to the proceeding scan. This instrument provides surface roughness measurements for a wide variety of surfaces which are quick and non-contact. This paper examines important features of the profiler as well as presenting data of the rms surface roughness of several substrates.

Paper Details

Date Published: 23 March 1987
PDF: 6 pages
Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); doi: 10.1117/12.939600
Show Author Affiliations
E R Cochran, University of Arizona (United States)
J C Wyant, WYKO Corporation (United States)


Published in SPIE Proceedings Vol. 0680:
Surface Characterization and Testing
Katherine Creath, Editor(s)

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