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Proceedings Paper

Phase-Measuring Interferometry Performance Parameters
Author(s): H Philip Stahl
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Paper Abstract

A variety of parameters are currently used to describe the performance of phase-measuring interferometers. Unfortunately, there is very little documentation concerning their definitions, quantifications, and suitabilities. This paper endeavors to address these issues as well as to discuss the theoretical foundations and limitations of specific parameters in hopes of stimulating progress towards a definitive set of phase-measuring interferometric performance parameters.

Paper Details

Date Published: 23 March 1987
PDF: 6 pages
Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); doi: 10.1117/12.939588
Show Author Affiliations
H Philip Stahl, Breault Research Organization, Inc. (United States)

Published in SPIE Proceedings Vol. 0680:
Surface Characterization and Testing
Katherine Creath, Editor(s)

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