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Proceedings Paper

Comparison Of Phase-Measurement Algorithms
Author(s): Katherine Creath
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Paper Abstract

Phase-measurement algorithms for calculating the phase of a wavefront from interference fringe data are compared. Experimental data show that different algorithms yield different phase values when using the same intensity data. A computer simulation of errors due to phase-shifter miscalibration and nonlinearity, as well as detector nonlinearity is performed to show that certain algorithms are more sensitive to some errors than others. Dependences of each of these errors is found versus percent of error over a 2ic range of phase values. These results enable the determination of what system errors are present in a phase-measurement interferometer.

Paper Details

Date Published: 23 March 1987
PDF: 10 pages
Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); doi: 10.1117/12.939587
Show Author Affiliations
Katherine Creath, WYKO Corporation (United States)

Published in SPIE Proceedings Vol. 0680:
Surface Characterization and Testing
Katherine Creath, Editor(s)

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