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Proceedings Paper

Optical Thin Film Monitoring Using Optical Fibers
Author(s): Norman L Thomas
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Paper Abstract

A Technique For Monitoring Optical Thin Film Thickness By Direct Evaporation Onto The End Of An Optical Fiber Is Described. The Optical Fiber Is Suspended Inside A Coating Chamber So That The Fiber Distal End Faces The Evaporation Source And Is Illuminated With A Chopped Light Source. The Light Which Is Reflected From The Fiber End Is Returned Through The Fiber And Is Collectyed By A 45° Mirror With A Hole In It. The Signal Is Detected And Displayed On Led Displays And A Chart Recorder. Multiple Fibers Are Used To Monitor Individual Layers In A Stack, Or A Single Fiber Is Used After Cleaving The End With A Tool To Produce A Clean, Flat, Uncoated Surface Without Breaking The Vacuum.

Paper Details

Date Published: 19 December 1986
PDF: 8 pages
Proc. SPIE 0679, Current Developments in Optical Engineering and Diffraction Phenomena, (19 December 1986); doi: 10.1117/12.939570
Show Author Affiliations
Norman L Thomas, Lawrence Livermore National Laboratory (United States)

Published in SPIE Proceedings Vol. 0679:
Current Developments in Optical Engineering and Diffraction Phenomena
Robert E. Fischer; James E. Harvey; Warren J. Smith, Editor(s)

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