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Proceedings Paper

The Measuring Method And Accuracy Of Thickness Of Optical Thin Film
Author(s): Jin-nian Li
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Paper Abstract

In this paper, the measuring accuracy about the angstrommeter is searched, and a special measuring method about the thickness of the optical coating is developed. A "fully assembling optical coating block" is used successfully. It consists of three kinds of optical coating from which 7 sorts of thickness can be formed. Properly choosing the arrangement model, we can composs 19 coudition equations. According to the theory of matrix square-error, we deduced the measuring accuracy of the coating thickness and the measuring accuracy of the interferometer itself. The method is also useful for some other films.

Paper Details

Date Published: 19 December 1986
PDF: 3 pages
Proc. SPIE 0679, Current Developments in Optical Engineering and Diffraction Phenomena, (19 December 1986); doi: 10.1117/12.939569
Show Author Affiliations
Jin-nian Li, Academia Sinica (China)


Published in SPIE Proceedings Vol. 0679:
Current Developments in Optical Engineering and Diffraction Phenomena
Robert E. Fischer; James E. Harvey; Warren J. Smith, Editor(s)

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