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Proceedings Paper

Optical Films Deposited By A Reactive Ion Plating Process
Author(s): H K Pulker; M BUhler; R Hora
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Paper Abstract

Oxide films on glass substrates, both single and multilayers, were produced by a special reactive ion plating process in the new automatic plating system BALZERS BAP 800. Structure, optical and mechanical film properties have been examined as a function of the deposition parameters. Multilayer systems consisting of TiO2 and Si02 films were deposited, and tests were made concerning optical characteristics, reproducibility and stability. Because of the unique characteristics of the films ion plating promises to become the new technology for the production of optical coatings.

Paper Details

Date Published: 23 December 1986
PDF: 5 pages
Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); doi: 10.1117/12.939544
Show Author Affiliations
H K Pulker, Balzers Ag (Liechtenstein)
M BUhler, Balzers Ag (Liechtenstein)
R Hora, Balzers Ag (Liechtenstein)

Published in SPIE Proceedings Vol. 0678:
Optical Thin Films II: New Developments
Richard Ian Seddon, Editor(s)

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