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Proceedings Paper

Evolution Of Surface Roughness And Scatter In Evaporated Zirconia/Silica Multilayer Coatings
Author(s): R E Klinger; P Swab
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Paper Abstract

Problems of light scattering in multilayer dielectric thin films arise from non-uniform variations in optical indices. The purpose of this work was to evaluate the surface roughness and interfaces in zirconia/silica multilayers with respect to scattering. Scatter and surface roughness were evaluated with angular resolved scatterometry (at 633 nm) and stylus profilometry. The multilayer thin film interfaces and growth morphologies were characterized with transmission electron microscopy using thin cross sections prepared by ultra-microtomy. Multilayer designs made of thick zirconia layers showed both a higher scattered intensity and scattering at higher angles than those designs composed of thinner zirconia layers. Stylus profilometry data agreed with this trend, indicating that surface roughness is determined more by the zirconia layer thickness than by the number of layers. Transmission electron microscopy (TEM) provided an explanation for this behavior. Zirconia was observed to nucleate and form a vertical columnar microstructure on silica from which evolved a coarse, dendritic growth morphology. The silica, on the other hand, seemed to moderate the contribution of the zirconia microstructure to the multilayer surface texture.

Paper Details

Date Published: 23 December 1986
PDF: 10 pages
Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); doi: 10.1117/12.939537
Show Author Affiliations
R E Klinger, Optical Coating Laboratory, Inc. (United States)
P Swab, Optical Coating Laboratory, Inc. (United States)


Published in SPIE Proceedings Vol. 0678:
Optical Thin Films II: New Developments
Richard Ian Seddon, Editor(s)

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