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Proceedings Paper

Quantitative Analysis Of Thin Film Morphology Evolution
Author(s): Joseph E Yehoda; Russell Messier
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Paper Abstract

There is considerable evidence that thin film morphology, which includes both the film top surface and internal void network structure, is a key link between film preparation processes and resulting film characteristics and properties. Quantitative preparation-property relations can only be obtained after a realistic morphology model is developed in sufficient detail. In this study we consider morphology in the context of our evolutionary structure zone model and introduce several methods for quantifying recorded images of the morphology.

Paper Details

Date Published: 23 December 1986
PDF: 9 pages
Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); doi: 10.1117/12.939536
Show Author Affiliations
Joseph E Yehoda, Materials Research Laboratory (United States)
Russell Messier, The Pennsylvania State University (United States)


Published in SPIE Proceedings Vol. 0678:
Optical Thin Films II: New Developments
Richard Ian Seddon, Editor(s)

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