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Proceedings Paper

Near-Angle Scatter Measurement On Diamond-Turned Surfaces
Author(s): H H Hurt; P A Temple; J M Bennett; D L Decker; V A Hodgkin
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Paper Abstract

The design and operation of a near-angle scatterometer that measures the total integrated scatter (TIS) from bare and coated diamond-turned surfaces are described. The scatterometer is designed to make TIS measurements from 0.06 out to 4 deg from the specular beam. Both bare and coated diamond-turned surfaces generated on two different machines were measured. The effect of machine control on minimizing near-angle scatter is discussed.

Paper Details

Date Published: 13 February 1987
PDF: 6 pages
Proc. SPIE 0676, Ultraprecision Machining and Automated Fabrication of Optics, (13 February 1987); doi: 10.1117/12.939529
Show Author Affiliations
H H Hurt, Naval Weapons Center (United States)
P A Temple, Naval Weapons Center (United States)
J M Bennett, Naval Weapons Center (United States)
D L Decker, Naval Weapons Center (United States)
V A Hodgkin, Naval Weapons Center (United States)


Published in SPIE Proceedings Vol. 0676:
Ultraprecision Machining and Automated Fabrication of Optics
Donald L. Decker, Editor(s)

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