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Proceedings Paper

Oxygen Ion Cleaning Of Organic Contaminants
Author(s): T J Deguchi; G R Sasaki; R J Champetier
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Paper Abstract

An experiment using low energy oxygen ions to clean organic films from bare aluminum mirrors was performed. Film removal was determined by measuring the reflectance of the mirrors in the ultraviolet region of the spectrum. The results of this study show that complete removal of hydrocarbon films is obtainable. This method may not be fully effective in removing silicon-based polymers. The removal rate for a hydrocarbon oil contami nant was determined to be 2.1 X 10-14 Å/ion.

Paper Details

Date Published: 3 June 1987
PDF: 8 pages
Proc. SPIE 0675, Stray Radiation V, (3 June 1987); doi: 10.1117/12.939506
Show Author Affiliations
T J Deguchi, Hughes Aircraft Company (United States)
G R Sasaki, Hughes Aircraft Company (United States)
R J Champetier, Hughes Aircraft Company (United States)

Published in SPIE Proceedings Vol. 0675:
Stray Radiation V
Robert P. Breault, Editor(s)

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