Proceedings PaperParticulate Contamination Control
|Format||Member Price||Non-Member Price|
|GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free.||Check Access|
Low scatter optical surfaces degrade as a function of time even under controlled clean room conditions. A technique to determine the clean room cleanliness level and period of exposure to achieve a given change in thebidirectional reflectance distribution function is described. Class 10 clean rooms will protect low scatter optics during assembly and test.