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Proceedings Paper

Nondestructive Evaluation Of Surface Roughness In The 0.01- To 1.0-Pm Range Using Infrared Ellipsometry
Author(s): S F Nee; H E Bennett
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Paper Abstract

Using effective medium theory, the surface roughness and the void fraction of very rough surfaces can be measured nondestructively using infrared ellipsometry. The results correlate well with stylus measurements in cases where the latter can be made. The ellipsometric technique may be useful in evaluating the roughness of optical baffle materials, which are usually too rough to be conveniently measured using other techniques.

Paper Details

Date Published: 3 June 1987
PDF: 10 pages
Proc. SPIE 0675, Stray Radiation V, (3 June 1987); doi: 10.1117/12.939503
Show Author Affiliations
S F Nee, Naval Weapons Center (United States)
H E Bennett, Naval Weapons Center (United States)

Published in SPIE Proceedings Vol. 0675:
Stray Radiation V
Robert P. Breault, Editor(s)

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