Share Email Print

Proceedings Paper

Frequency Response Characteristics Of An Optical Scatterometer And A Surface Profilometer
Author(s): G A Al-Jumaily; S R Wilson; J R McNeil
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The frequency response characteristics of an angle-resolved optical scatterometer and a mechanical profilometer are examined. The transfer function for the scatterometer is found to be constant within the spatial frequency bandwidth of the system. The mechanical profilometer is found to have a nonlinear response. The effect of the nonlinearity on the frequency response of the mechanical profilometer is examined.

Paper Details

Date Published: 3 June 1987
PDF: 10 pages
Proc. SPIE 0675, Stray Radiation V, (3 June 1987); doi: 10.1117/12.939477
Show Author Affiliations
G A Al-Jumaily, The University of New Mexico (United States)
S R Wilson, The University of New Mexico (United States)
J R McNeil, The University of New Mexico (United States)

Published in SPIE Proceedings Vol. 0675:
Stray Radiation V
Robert P. Breault, Editor(s)

© SPIE. Terms of Use
Back to Top