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Proceedings Paper

Frequency Response Characteristics Of An Optical Scatterometer And A Surface Profilometer
Author(s): G A Al-Jumaily; S R Wilson; J R McNeil
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Paper Abstract

The frequency response characteristics of an angle-resolved optical scatterometer and a mechanical profilometer are examined. The transfer function for the scatterometer is found to be constant within the spatial frequency bandwidth of the system. The mechanical profilometer is found to have a nonlinear response. The effect of the nonlinearity on the frequency response of the mechanical profilometer is examined.

Paper Details

Date Published: 3 June 1987
PDF: 10 pages
Proc. SPIE 0675, Stray Radiation V, (3 June 1987); doi: 10.1117/12.939477
Show Author Affiliations
G A Al-Jumaily, The University of New Mexico (United States)
S R Wilson, The University of New Mexico (United States)
J R McNeil, The University of New Mexico (United States)


Published in SPIE Proceedings Vol. 0675:
Stray Radiation V
Robert P. Breault, Editor(s)

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