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Proceedings Paper

Wafer-Scale Laser Pantography: VI. Direct-Write Interconnection Of VLSI Gate Arrays
Author(s): Bruce M McWilliams; Hon Wah Chin; Irving P Herman; Roderick A. Hyde; Fred Mitlitsky; John C. Whitehead; Lowell L. Wood
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Paper Abstract

General principles of laser direct-write deposition processes are reviewed. Device interconnection of CMOS gate arrays by means of computer-controlled, laser-induced thermochemical surface reactions is described. Interconnection quality parameters are related, and processing rate considerations are discussed.

Paper Details

Date Published: 14 June 1984
PDF: 6 pages
Proc. SPIE 0459, Laser-Assisted Deposition, Etching, and Doping, (14 June 1984); doi: 10.1117/12.939434
Show Author Affiliations
Bruce M McWilliams, University of California (United States)
Hon Wah Chin, University of California (United States)
Irving P Herman, University of California. (United States)
Roderick A. Hyde, University of California (United States)
Fred Mitlitsky, University of Califo-rnia (United States)
John C. Whitehead, University of California (United States)
Lowell L. Wood, University of California (United States)


Published in SPIE Proceedings Vol. 0459:
Laser-Assisted Deposition, Etching, and Doping
Susan Davis Allen, Editor(s)

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