Share Email Print
cover

Proceedings Paper

Laser Microprobe Mass Analysis Of Materials
Author(s): Robert W. Odom; Charles J. Hitzman
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Laser microprobe mass analysis (LMMA) is a relatively new microanalytical technique used in the characterization of materials elemental and molecular composition. The LMMA technique is based on performing a mass and intensity analysis of the ionic components formed during high power density laser irradiation of a materials surface. The micro-analytical characteristic of this materials analysis technique results from utilizing a finely focused (%1.0pm diameter) laser pulse to initiate the vaporization and ionization of the materials constituents. The combination of this finely focused, high power density (variable between %108 to 1012 w/cm2) laser pulse with time-of-flight (TOF) mass analysis techniques provides a complete mass spectrum of the ionization produced during each laser shot and results in elemental detection sensitivities which are in the ppm (atomic) range. This paper presents a discussion of the principles of laser microprobe mass analysis along with a series of applications of the technique in the microanalytical characterization of such materials as metals, insulators, and semiconductor devices.

Paper Details

Date Published: 31 May 1984
PDF: 11 pages
Proc. SPIE 0458, Applications of Lasers to Industrial Chemistry, (31 May 1984); doi: 10.1117/12.939409
Show Author Affiliations
Robert W. Odom, Charles Evans & Associates (United States)
Charles J. Hitzman, Charles Evans & Associates (United States)


Published in SPIE Proceedings Vol. 0458:
Applications of Lasers to Industrial Chemistry
Richard L. Woodin; Andrew Kaldor, Editor(s)

© SPIE. Terms of Use
Back to Top