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Proceedings Paper

Laser Microprobe Mass Analysis Of Materials
Author(s): Robert W. Odom; Charles J. Hitzman
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Paper Abstract

Laser microprobe mass analysis (LMMA) is a relatively new microanalytical technique used in the characterization of materials elemental and molecular composition. The LMMA technique is based on performing a mass and intensity analysis of the ionic components formed during high power density laser irradiation of a materials surface. The micro-analytical characteristic of this materials analysis technique results from utilizing a finely focused (%1.0pm diameter) laser pulse to initiate the vaporization and ionization of the materials constituents. The combination of this finely focused, high power density (variable between %108 to 1012 w/cm2) laser pulse with time-of-flight (TOF) mass analysis techniques provides a complete mass spectrum of the ionization produced during each laser shot and results in elemental detection sensitivities which are in the ppm (atomic) range. This paper presents a discussion of the principles of laser microprobe mass analysis along with a series of applications of the technique in the microanalytical characterization of such materials as metals, insulators, and semiconductor devices.

Paper Details

Date Published: 31 May 1984
PDF: 11 pages
Proc. SPIE 0458, Applications of Lasers to Industrial Chemistry, (31 May 1984); doi: 10.1117/12.939409
Show Author Affiliations
Robert W. Odom, Charles Evans & Associates (United States)
Charles J. Hitzman, Charles Evans & Associates (United States)

Published in SPIE Proceedings Vol. 0458:
Applications of Lasers to Industrial Chemistry
Richard L. Woodin; Andrew Kaldor, Editor(s)

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