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Proceedings Paper

Characterization Of Semiconductor Silicon By Transmission Electron Microscopy
Author(s): Teh Y. Tan
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Paper Abstract

In this review some basics of the transmission electron microscopy, the instrument, its operations and the types of scientific information obtainable from crystalline materials are first discussed and then some subjects pertaining to recent characterization of silicon are discussed. The subjects chosen are those that had outstanding impacts in technology and/or in science for which studies using the transmission electron microscope forms an indispensible part of the characterization efforts.

Paper Details

Date Published: 10 May 1984
PDF: 7 pages
Proc. SPIE 0452, Spectroscopic Characterization Techniques for Semiconductor Technology I, (10 May 1984); doi: 10.1117/12.939302
Show Author Affiliations
Teh Y. Tan, IBM Thomas J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0452:
Spectroscopic Characterization Techniques for Semiconductor Technology I
Robert S. Bauer; Fred H. Pollak, Editor(s)

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