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Proceedings Paper

Fabrication Of Free-Standing X-Ray Transmission Gratings And Zone Plates
Author(s): Y Vladimirsky; E Kallne; Eberhard Spiller
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Paper Abstract

Free-standing transmission gratings and zone plates which are to be used as dispersion elements for x rays have been fabricated with UV holography and x-ray lithography.

Paper Details

Date Published: 19 March 1984
PDF: 13 pages
Proc. SPIE 0448, X-Ray Lithography and Applications of Soft X-Rays to Technology, (19 March 1984); doi: 10.1117/12.939204
Show Author Affiliations
Y Vladimirsky, Smithsonian Astrophysical Observatory (United States)
E Kallne, Smithsonian Astrophysical Observatory (United States)
Eberhard Spiller, IBM T.J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0448:
X-Ray Lithography and Applications of Soft X-Rays to Technology
Alan D. Wilson, Editor(s)

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