Share Email Print
cover

Proceedings Paper

Electron Beam Fabrication And Characterization Of Fresnel Zone Plates For Soft X-Ray Microscopy
Author(s): D Kern; P Coane; R Acosta; T.H. P. Chang; R Feder; P Houzego; W Molzen; J Powers; A Speth; R Viswanathan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A high resolution Vector Scan electron beam lithography system for fabrication of structures with minimum dimensions below 100 nm is described. A selection was made from a variety of processes suitable for high resolution fabrication, in order to provide the desired properties of apodized Fresnel zone plates used in the Stony Brook X-ray scanning microscope. Experimental characterization of the zone plates with regard to resolution and efficiency in the microscope is described.

Paper Details

Date Published: 27 March 1984
PDF: 10 pages
Proc. SPIE 0447, Science with Soft X-Rays, (27 March 1984); doi: 10.1117/12.939200
Show Author Affiliations
D Kern, IBM T.J.Watson Research Center (United States)
P Coane, IBM T. J. Watson Research Center (United States)
R Acosta, IBM T. J. Watson Research Center (United States)
T.H. P. Chang, IBM T. J. Watson Research Center (United States)
R Feder, IBM T. J. Watson Research Center (United States)
P Houzego, IBM T. J. Watson Research Center (United States)
W Molzen, IBM T. J. Watson Research Center (United States)
J Powers, IBM T. J. Watson Research Center (United States)
A Speth, IBM T. J. Watson Research Centel (United States)
R Viswanathan, IBM T. J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0447:
Science with Soft X-Rays

© SPIE. Terms of Use
Back to Top