Share Email Print
cover

Proceedings Paper

Development Of High Resolution Zone Plate By Holography And Ion-Etching Techniques
Author(s): Yong-Gang Su; Shao-Jun Fu; Xiao-Min Tao; Yi-Lin Hong; Yun-Wu Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The purpose of development and the processing steps to fabricate high resolution zone plates, especially holographic exposure and ion-etching, are described. Also the experimental results and some prospects are presented.

Paper Details

Date Published: 15 January 1988
PDF: 4 pages
Proc. SPIE 0673, Holography Applications, (15 January 1988); doi: 10.1117/12.939105
Show Author Affiliations
Yong-Gang Su, University of Science and Technology of China (China)
Shao-Jun Fu, University of Science and Technology of China (China)
Xiao-Min Tao, University of Science and Technology of China (China)
Yi-Lin Hong, University of Science and Technology of China (China)
Yun-Wu Zhang, University of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 0673:
Holography Applications
Jingtang Ke; Ryszard J. Pryputniewicz, Editor(s)

© SPIE. Terms of Use
Back to Top