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Proceedings Paper

Hologram Interferometer For Film Deposits Evaluation
Author(s): Diana Tentori; Martin Celaya
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Paper Abstract

The design and performance of a holographic interferometer for the assessment of thin film deposits made on dielectric substrates is presented. Thickness and uniformity of film deposits thicker than 1 micron can be evaluated with this device. This interferometer can also be used in a reflection mode to test non-dielectric deposits made on opaque substrates.

Paper Details

Date Published: 15 January 1988
PDF: 4 pages
Proc. SPIE 0673, Holography Applications, (15 January 1988); doi: 10.1117/12.939055
Show Author Affiliations
Diana Tentori, CICESE Research Center (Mexico)
Martin Celaya, CICESE Research Center (Mexico)

Published in SPIE Proceedings Vol. 0673:
Holography Applications
Jingtang Ke; Ryszard J. Pryputniewicz, Editor(s)

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