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Proceedings Paper

Infrared Holography Using A Co2 Laser And Its Application To Si-Wafer Inspection
Author(s): Guanchao Sun; Zijuen Yuan
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Paper Abstract

The results of the development of IR holography at 10.6μm wavelength and its application to inspection of nontransparent metal object and transparent Si-wafer are presented. Polyvinyl alcohol film and oil film have been used as recording media.

Paper Details

Date Published: 15 January 1988
PDF: 4 pages
Proc. SPIE 0673, Holography Applications, (15 January 1988); doi: 10.1117/12.939032
Show Author Affiliations
Guanchao Sun, Hefei Polytechnical University (China)
Zijuen Yuan, Hefei Polytechnical University (China)

Published in SPIE Proceedings Vol. 0673:
Holography Applications
Jingtang Ke; Ryszard J. Pryputniewicz, Editor(s)

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