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Proceedings Paper

The Fiber-Optic Instrument For Extremely Small Roughness Measurement
Author(s): A. Domanski; W. Ejchart; J. Jedrzejewski; R. M. Siegoczynski; W. Tlaczala
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Paper Abstract

The fiber-optic instrument of ability to measure roughness of surfaces has been built. It works in the range of profil mean deviation 20 nm <Ra <150 nm. Light of 0,88 μm wave length is led by the fiber to the surface and is analysed by other fiber fixed in a focal plane of the lens. The device is used to check the base plate in microelectronic semi-conductor technics.

Paper Details

Date Published: 10 November 1986
PDF: 3 pages
Proc. SPIE 0670, Optical Fibres and Their Applications IV, (10 November 1986); doi: 10.1117/12.938978
Show Author Affiliations
A. Domanski, Technical University of Warsaw (Poland)
W. Ejchart, Technical University of Warsaw (Poland)
J. Jedrzejewski, Technical University of Warsaw (Poland)
R. M. Siegoczynski, Technical University of Warsaw (Poland)
W. Tlaczala, Technical University of Warsaw (Poland)


Published in SPIE Proceedings Vol. 0670:
Optical Fibres and Their Applications IV
Ryszard S. Romaniuk; Mieczyslaw Szustakowski, Editor(s)

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