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Proceedings Paper

Laser Photochemistry Of Gallium-Containing Compounds
Author(s): Steven L Baughcum; Richard C Oldenborg
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Paper Abstract

The production of gas-phase gallium atoms in the photolysis of trimethylgallium has been investigated at 193 nm and at other laser wavelengths. Ground state (42P03/2) and metastable (4 2P01/2) gallium atoms are detected using laser-induced fluorescence techniques. Our results indicate that gallium atoms continue to be produced at long times after the laser pulse. The observed dependences on photolysis laser fluence, trimethylgallium pressure, and buffer gas pressure are consistent with a mechanism in which highly excited gallium methyl radicals undergo unimolecular decomposition to produce gallium atoms. Since this process is observed to happen on the time scale of hundreds of microseconds, these results have important implications for studies of metal deposition and direct laser writing by laser photolysis of organometallic compounds.

Paper Details

Date Published: 25 November 1986
PDF: 9 pages
Proc. SPIE 0669, Laser Applications in Chemistry, (25 November 1986); doi: 10.1117/12.938939
Show Author Affiliations
Steven L Baughcum, Los Alamos National Laboratory (United States)
Richard C Oldenborg, Los Alamos National Laboratory (United States)


Published in SPIE Proceedings Vol. 0669:
Laser Applications in Chemistry
D. K. Evans, Editor(s)

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