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Proceedings Paper

The Development Of Industrial Excimer Lasers
Author(s): Jeffrey I Levatter
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Paper Abstract

The first discharge pumped excimer lasers introduced in the 1970's were derivatives of N2 and C02 TEA lasers. They had spatially non-uniform outputs, relatively small output energies, low average powers, short operating lifetimes, and poor reliability. Today, more than a decade later, excimer lasers are just now maturing to the point where they are starting to enter the industrial workplace. This paper will review the transition from CO2/N2 to excimer technology, the engineering hurdles excimer lasers must overcome to make them viable industrial tools, and the current state of the "industrial excimer laser".

Paper Details

Date Published: 12 November 1986
PDF: 4 pages
Proc. SPIE 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering, (12 November 1986); doi: 10.1117/12.938923
Show Author Affiliations
Jeffrey I Levatter

Published in SPIE Proceedings Vol. 0668:
Laser Processing: Fundamentals, Applications, and Systems Engineering
Walter W. Duley; Robert W. Weeks, Editor(s)

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