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Proceedings Paper

Applications Of Beam-Solid Interactions In Semiconductor Material And Device Processing
Author(s): John C.C Fan
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Paper Abstract

Pulsed or scanned energy beams have been shown to be very useful for many semiconductor applications, ranging from annealing of ion-implanted damage to preparation of materials.

Paper Details

Date Published: 12 November 1986
PDF: 7 pages
Proc. SPIE 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering, (12 November 1986); doi: 10.1117/12.938888
Show Author Affiliations
John C.C Fan, Kopin Corporation (United States)

Published in SPIE Proceedings Vol. 0668:
Laser Processing: Fundamentals, Applications, and Systems Engineering
Walter W. Duley; Robert W. Weeks, Editor(s)

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