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Proceedings Paper

Optical Roughness Measurements Of Industrial Surfaces
Author(s): David Gilsinn; Theodore Vorburger; Lin-Xiang Cao; Charles Giauque; Fredric Scire; E.Clayton Teague
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Paper Abstract

This paper reviews our efforts to develop the theory and instrumentation needed to measure surface roughness of manufactured surfaces by optical scattering methods. We are addressing three key problems: developing a valid and sufficient optical scattering theory for this roughness range, applying appropriate mathematical inversion techniques so that practical roughness parameters can be calculated from scattering distributions, and finally evaluating a compact commercial instrument for a wide variety of problems. Recent results from our group suggest that the simple phase screen approximation model of optical scattering validly describes light scattering from machined metal surfaces with a predominant surface lay in the 0.01 pm R to 3.0 pm R range. A model for scattering in the entire farr-field hemisphere and obsera vations on our r approach to the inverse problem is given.

Paper Details

Date Published: 23 October 1986
PDF: 9 pages
Proc. SPIE 0665, Optical Techniques for Industrial Inspection, (23 October 1986); doi: 10.1117/12.938768
Show Author Affiliations
David Gilsinn, National Bureau of Standards (United States)
Theodore Vorburger, National Bureau of Standards (United States)
Lin-Xiang Cao, National Bureau of Standards (United States)
Charles Giauque, National Bureau of Standards (United States)
Fredric Scire, National Bureau of Standards (United States)
E.Clayton Teague, National Bureau of Standards (United States)

Published in SPIE Proceedings Vol. 0665:
Optical Techniques for Industrial Inspection
Paolo G. Cielo, Editor(s)

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