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Proceedings Paper

Removing Interference Fringes To Improve Accuracy Of Film Thickness Spectroscopic Measurements
Author(s): Piotr W Kiedron
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Paper Abstract

Computer simulations are performed to compare effectiveness of band averaging, angle averaging, Brewster angle, multi-pass, and Fourier filtering methods of interference effect cancellation in film thickness measurement. Results indicate that the Brewster angle and multi-pass methods are superior for a 2-wavelength measuring system. Fourier filtering in the full spectrum systems offer new methods of film thickness measurement.

Paper Details

Date Published: 23 October 1986
PDF: 18 pages
Proc. SPIE 0665, Optical Techniques for Industrial Inspection, (23 October 1986); doi: 10.1117/12.938734
Show Author Affiliations
Piotr W Kiedron, NDC Systems (United States)


Published in SPIE Proceedings Vol. 0665:
Optical Techniques for Industrial Inspection
Paolo G. Cielo, Editor(s)

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