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Proceedings Paper

Three-Dimensional Surface Metrology Using A Computer Controlled Non-Contact Instrument
Author(s): James C. Wyant; Keith N. Prettyjohns
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Paper Abstract

This paper describes a non-contact three dimensional surface profiler. The instrument is based upon direct phase measurement interferometry using a microscope to measure surface heights over an area from 0.25 mm square to 4.0 mm square. A 256 X 256 element photodiode detector array is used as the image sensor. Computer software has been written to control the instrument, and perform the phase measurement and full statistical and Fourier analysis of the surface. Results are shown of measurements for a variety of surfaces tested.

Paper Details

Date Published: 25 November 1986
PDF: 4 pages
Proc. SPIE 0661, Optical Testing and Metrology, (25 November 1986); doi: 10.1117/12.938628
Show Author Affiliations
James C. Wyant, WYKO Corporation (United States)
Keith N. Prettyjohns, WYKO Corporation (United States)


Published in SPIE Proceedings Vol. 0661:
Optical Testing and Metrology
Chander Prakash Grover, Editor(s)

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