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Proceedings Paper

Standards For Three-Dimensional Mensuration With Electron Micrographs
Author(s): Sanjib K. Ghosh
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Paper Abstract

Precision measurement in three-dimensions and mapping require acceptable "standards" for the electron microscope (EM) systems. The best available standards are carbon replicas made from master diffraction gratings. Since these are two-dimensional, certain configurations of convergent micrography can be used to "generate" the third dimension. The process, as has been developped with regard to both Scanning Electron Microscope (SEM) and Transmission Electron Microscope (TEM), is discussed. The procedure can be used in calibrating any EM system, on-the-job, even on an ad hoc basis. Fundamental to the procedure is the collinearity condition inherent in the imaging system ensuring that the object point, the corresponding image point and the center of projection lie on the same straight line. The consideration of the involved parameters and of the necessary number of micrographs in the solution are discussed. Certain very encouraging results obtained from recent research studies at Laval University are presented.

Paper Details

Date Published: 25 November 1986
PDF: 5 pages
Proc. SPIE 0661, Optical Testing and Metrology, (25 November 1986); doi: 10.1117/12.938625
Show Author Affiliations
Sanjib K. Ghosh, Laval University (Canada)


Published in SPIE Proceedings Vol. 0661:
Optical Testing and Metrology
Chander Prakash Grover, Editor(s)

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