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Proceedings Paper

Complementary and Analogous Information Obtained by Acoustic and Light Microscopy
Author(s): Andreas A. Thaer
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Paper Abstract

Since Scanning Acoustic Microscopy (SAM) has reached and exceeded light microscopical resolution more than 6 years ago, its systematic application and realization by commercially available instrumentation has started. For a better understanding of the possible contribution of SAM to applied microscopy in general, the nature of information obtained by SAM in comparison with modern light microscopy, i.e. the fundamental character of the interaction of acoustic waves with the elastic properties of microscopical properties under investigation is discussed. After explaning the essential elements of SAM systems in comparison with conventional and scanning optical microscopes (SOM), typical examples of SAM applications to material sciences, microcircuit inspection and living cells are given

Paper Details

Date Published: 20 October 1986
PDF: 13 pages
Proc. SPIE 0656, Contemporary Optical Instrument Design, Fabrication, and Testing, (20 October 1986); doi: 10.1117/12.938472
Show Author Affiliations
Andreas A. Thaer, Consultant (Germany)

Published in SPIE Proceedings Vol. 0656:
Contemporary Optical Instrument Design, Fabrication, and Testing
Leo H. J. F. Beckmann; J. David Briers; Paul R. Yoder, Editor(s)

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