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Proceedings Paper

Fabrication Of Aspheric Germanium-Lens Surfaces By Ion Milling
Author(s): O. Podzimek; L. H. J. F. Beckmann; J. A. Brok
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Paper Abstract

Ion milling was studied as a method for removing a well defined amount of material from a spherically shaped surface to fabricate high quality aspheric germanium lenses. The ion-current density of the beam was determined as a function of the acceleration voltage and argon-gas flow in order to find near optimum conditions for smooth etching of the lens surface. The sputtering yield was studied as a function of the angle of incidence of the beam with respect to the target surface. Based upon these data, a computer program was designed, which controls the dwell time and the corresponding position of the lens with respect to the ion beam such as to generate a prescribed surface shape.

Paper Details

Date Published: 20 October 1986
PDF: 5 pages
Proc. SPIE 0656, Contemporary Optical Instrument Design, Fabrication, and Testing, (20 October 1986); doi: 10.1117/12.938469
Show Author Affiliations
O. Podzimek, Twente University of Technology (Netherlands)
L. H. J. F. Beckmann, Twente University of Technology (Netherlands)
J. A. Brok, Twente University of Technology (Netherlands)

Published in SPIE Proceedings Vol. 0656:
Contemporary Optical Instrument Design, Fabrication, and Testing
Leo H. J. F. Beckmann; J. David Briers; Paul R. Yoder Jr., Editor(s)

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