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Proceedings Paper

Fabrication Of Aspheric Germanium-Lens Surfaces By Ion Milling
Author(s): O Podzimek; L H.J.F Beckmann; J A Brok
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Paper Abstract

Ion milling was studied as a method for removing a well defined amount of material from a spherically shaped surface to fabricate high quality aspheric germanium lenses. The ion-current density of the beam was determined as a function of the acceleration voltage and argon-gas flow in order to find near optimum conditions for smooth etching of the lens surface. The sputtering yield was studied as a function of the angle of incidence of the beam with respect to the target surface. Based upon these data, a computer program was designed, which controls the dwell time and the corresponding position of the lens with respect to the ion beam such as to generate a prescribed surface shape.

Paper Details

Date Published: 31 October 1986
PDF: 5 pages
Proc. SPIE 0655, Optical System Design, Analysis, Production for Advanced Technology Systems, (31 October 1986); doi: 10.1117/12.938446
Show Author Affiliations
O Podzimek, Twente University of Technology (Netherlands)
L H.J.F Beckmann, Twente University of Technology (Netherlands)
J A Brok, Twente University of Technology (Netherlands)


Published in SPIE Proceedings Vol. 0655:
Optical System Design, Analysis, Production for Advanced Technology Systems
Robert E. Fischer; Philip J. Rogers, Editor(s)

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