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Proceedings Paper

Performance Of Sputter Deposited Multi Layer X-Ray Mirrors
Author(s): M Arbaoui; R Barchewitz; C. Sella; K B Youn
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Paper Abstract

Multilayer X-ray mirrors have been deposited by triode dc sputtering using a new method of thickness monitoring which is based on the dependence of the deposition rate on the target current. Thicknesses can be controlled with an accuracy of better than 0.1 ⟨. High efficiency W-C, and Ni-C multilayer mirrors have been synthesized and tested at 1.54 Å (Cu Kα) and 44.79 Å (CK,α). Absolute reflectivity measurements at λ = 44.79⟨ (CKD) have been carried out. In this case the incident beam is previously polarized by a premonochromator equipped with a pair of parallel plane multilayer mirrors fixed at an angle close to Brewster's one (0---,45°). Thus the measured reflectivities are not affected by a progressive variation of the P component.

Paper Details

Date Published: 13 October 1986
PDF: 8 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938396
Show Author Affiliations
M Arbaoui, Universite P. et M. Curie (France)
R Barchewitz, Universite P. et M. Curie (France)
C. Sella, Laboratoire de Physique des Materiaux (France)
K B Youn, Laboratoire de Physique des Materiaux (France)


Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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