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Proceedings Paper

Optical Study Of The Growth Of Ta2O5 and SiO2 Layers Obtained By Ion Assisted Deposition
Author(s): F Flory; G Albrand; C Montelymard; E Pelletier
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Paper Abstract

Argon ion bombardment conditions to obtain Ta205 and Si02 layers with a minimal optical absorption and a packing density close to one are defined. Applied to multilayers, these techniques give filters with an excellent stability of their optical properties when exposed to a moist atmosphere.

Paper Details

Date Published: 13 October 1986
PDF: 8 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938387
Show Author Affiliations
F Flory, Domaine Universitaire de St Jerome (France)
G Albrand, Domaine Universitaire de St Jerome (France)
C Montelymard, Domaine Universitaire de St Jerome (France)
E Pelletier, Domaine Universitaire de St Jerome (France)

Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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