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Proceedings Paper

Ion And Photon-Beam Assisted Deposition Of Thin Films
Author(s): H A Macleod
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Paper Abstract

Optical-coatings problems can be traced to the microstructure inherent in the optical-coating process of thermal evaporation in vacuo. Ion and photon bombardment techniques have been associated in various ways with thin-film deposition. Some processes that incorporate these techniques improve optical-coating performance. Processes relevant to optical-coating construction are surveyed and some recent results are discussed. Ion-assisted deposition and laser evaporation are identified as particularly promising optical coatings.

Paper Details

Date Published: 13 October 1986
PDF: 13 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938384
Show Author Affiliations
H A Macleod, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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