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Proceedings Paper

Effects Of Dispersion On The Determination Of Optical Constants Of Thin Films
Author(s): C K. Carniglia
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Paper Abstract

The optical constants n and k for a weakly absorbing thin film material can be determined from the transmission scan of a single thick layer of the material coated on a substrate. The envelope method makes use of the wavelengths and transmittance values of the maxima and minima of a spectral scan to determine the optical constants. The values and positions of these extrema are affected by the dispersion of the optical constants. The dispersion of the index affects the position of the odd quarterwave extrema, but not the halfwave extrema. The effect is small (typically 0.5%) for high index oxide materials. The dispersion in the extinction coefficient causes larger errors, especially near the absorption edge where the extrema can be shifted by several percent. The effects of the dispersion are calculated and the results are used to obtain more accurate values of the optical constants and thickness of the film. The various errors and the resulting corrections to the optical constants are compared for a typical high index oxide film.

Paper Details

Date Published: 13 October 1986
PDF: 8 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938373
Show Author Affiliations
C K. Carniglia, Martin Marietta Aerospace (United States)

Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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