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Proceedings Paper

Micro-/Ultramicro Hardness Measurements with Insulating Films
Author(s): H K Pulker; K Salzmann; C Reichert
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Paper Abstract

Due to the definition of classical indentation hardness, the plastic behaviour of a material is investigated. But in the load-dependent range the influence of the elastic deformation also becomes noticeable. There is a remarkable difference between diagonal length and resulting hardness, in case of a pure dielectric and a dielectric with thin ductile metallic overcoat required for examination in a scanning electron microscope (SEM). According to the almost plastic behaviour of the overcoat, the diagonal length of the imprint produced by a diamond indenter under load, i.e. before elastic backformation, is "fixed". So it is necessary, in contradiction to investigations made with precoated dielectrics, to produce indents on the pure surface, for instance with Reichert-Jung Micro-Duromat 4000, and to measure them with a light microscope or, in the case of too small indents, with a SEM after coating with a thin conducting film.

Paper Details

Date Published: 13 October 1986
PDF: 7 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938370
Show Author Affiliations
H K Pulker, Balzers AG (Liechtenstein)
K Salzmann, Optische Werke AG (Austria)
C Reichert, Optische Werke AG (Austria)

Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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