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Proceedings Paper

Mechanical Properties Of Coatings Revealed By Ultra Low Load (VICKERS) Hardness Measurements In A SEM
Author(s): H Bangert; A Wagendristel; K H Guenther
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Paper Abstract

Some outstandi,,g features of a new device for hardness measurements in a SEM are presented and its capability in optical applications is demonstrated. It will be shown that both the quantitative hardness deterhuination fmail. imprint size as well as a visual observation of the imprint topology are essential for quality assessment.

Paper Details

Date Published: 13 October 1986
PDF: 5 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938369
Show Author Affiliations
H Bangert, Technical University Vienna (Austria)
A Wagendristel, Technical University Vienna (Austria)
K H Guenther, Balzers AG/University of Alabama (United States)


Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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