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Proceedings Paper

Inverse Synthesis For Analyzing The Variations Of Spectral Properties Of Optical Multilayers From Different Coating Runs
Author(s): W Klug; M Boos; R Herrmann; H Schwiecker
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Paper Abstract

The inverse synthesis method is investigated for its ability to deduce the construction parameters of a complete layer system from its reflectance or transmittance curve at nor-mal incidence. To avoid multiple solutions the theoretical design of the layer system is used as a starting design and by subsequent optimization the actual construction parameters can be found. The impetus of this work was to develop a tool for the thin film engineer to speed up thin film development. A 6-layer broadband antireflection coating is used as an example for testing the inverse synthesis method. The necessary measurement accuracy for the spectral reflectance is discussed. A series of 10 successive production runs is analyzed. The variations of layer thicknesses from run to run are given.

Paper Details

Date Published: 13 October 1986
PDF: 6 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938367
Show Author Affiliations
W Klug, Leybold-Heraeus GmbH (Germany)
M Boos, Leybold-Heraeus GmbH (Germany)
R Herrmann, Leybold-Heraeus GmbH (Germany)
H Schwiecker, Leybold-Heraeus GmbH (Germany)

Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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