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Proceedings Paper

Set Up For Filter And Mirror Efficiencies Measurements In The UV and VUV Spectral Range
Author(s): M Pouey; A. Malherbe
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Paper Abstract

A vacuum reflectometer for the UV and VUV spectral range was developed for qualification of optical components below 400 nm. Typical performances, in the 120-320 nm spectral range, of filters and mirrors offered by MATRA will be presented. Fitted with various gratings and sources this device allows reflecting, transmitting power as well as scattered or diffracted flux measurements (gratings efficiency measurements) until 25 nm.

Paper Details

Date Published: 13 October 1986
PDF: 5 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938366
Show Author Affiliations
M Pouey, Universite PARIS (France)
A. Malherbe, Matra Centre Equipements (France)


Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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