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Proceedings Paper

Optical Monitoring: Comparison Of Different Monitoring Strategies With Respect To The Resulting Reproducibility To The Completed Layer Systems
Author(s): A Zoller; R Herrmann; W Klug; W Zultzke
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Paper Abstract

A broadband antireflection coating on BK 7 was used to investigate the influence of dif-ferent optical monitoring strategies on the reproducibility of the completed layer system. The coating design consisted of 6 alternating layers of MgF2 and TiO2 of which 4 layers had optical thicknesses less than a quarterwave. Two different monitoring strategies were tes-ted: single test slide monitoring (all layers on one test slide) and monitoring of each layer on a separate test slide. Each strategy was tested by performing 10 production runs in a completely automated coating system equipped with a monochromatic photometer. The single test slide method proved to be more reproducible for the production of this specific layer system.

Paper Details

Date Published: 13 October 1986
PDF: 6 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938353
Show Author Affiliations
A Zoller, Leybold - Heraeus GmbH (Germany)
R Herrmann, Leybold - Heraeus GmbH (Germany)
W Klug, Leybold - Heraeus GmbH (Germany)
W Zultzke, Leybold - Heraeus GmbH (Germany)

Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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