Share Email Print
cover

Proceedings Paper

An Evaporation Monitoring System featuring "Software" Trigger Points and On line Evaluation of Refractive Indices
Author(s): Christian Schroedter
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A microcomputer based evaporation monitoring system is presented which operates on a standard production plant equipped with standard thin film measuring devices: photometer and quartz crystal monitor. The computer acts as an evaporation data acquisition and storage system. The transmission T of a sample substrate as well as the film thickness d taken from the quartz monitor are recorded digitally vs. time. The T-d relation is on line least-squares fitted to the theoretical T-d function of an arbitrary nonabsorbing homogeneous layer deposited on an arbitrary stack. Using the fit function an optical thickness can be expressed in terms of the linear parameter d for instance as trigger point for termination of the deposition process. The procedure is especially suitable in turning points. In non-absorbing systems the fit function directly yields the refractive index of the layer.

Paper Details

Date Published: 13 October 1986
PDF: 6 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938352
Show Author Affiliations
Christian Schroedter, Max:Planck-Institut fuer Quantenoptik (Germany)


Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

© SPIE. Terms of Use
Back to Top