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Proceedings Paper

Automated Optical Coating Processes With Optical Thickness Monitoring
Author(s): R Herrmann; A Zoller
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Paper Abstract

Optical monitoring methods and their integration into automated vacuum coating systems are reviewed. Special attention is paid to monochromatic monitoring, the achievable monitoring accuracies, error compensation and error accumulation effects and the on line correction of trigger points. Finally a microprocessor control system with integrated monochromatic thickness monitoring is described.

Paper Details

Date Published: 13 October 1986
PDF: 8 pages
Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938350
Show Author Affiliations
R Herrmann, Leybold-Heraeus GmbH (Germany)
A Zoller, Leybold-Heraeus GmbH (Germany)


Published in SPIE Proceedings Vol. 0652:
Thin Film Technologies II
J. Roland Jacobsson, Editor(s)

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